"Scaleable stagnation-flow reactors for uniform materials deposition: A" by K. F. McCarty, E. Meeks et al.
 

Department

Mechanical Engineering

Document Type

Article

Publication Title

Applied Physics Letters

ISSN

0003-6951

Volume

63

Issue

11

DOI

10.1063/1.109668

First Page

1498

Last Page

1500

Publication Date

12-1-1993

Abstract

We describe two inherently scaleable geometries for chemical-vapor- deposition and heat-transfer processes that are based on stagnation flows. The "coflow" and "trumpet-bell" designs result in radially uniform fluxes to surfaces and they optimize the use of reagents. Using a trumpet-bell burner, we have grown uniform films of diamond from a substrate-stabilized flat flame of C2H2/H2/O2.

Creative Commons License

Creative Commons Attribution 4.0 International License
This work is licensed under a Creative Commons Attribution 4.0 International License.

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